Quality Made in Germany since 1995

Quality Made in Germany since 1995

Manipulators

Manipulators

Electrical semiconductor testing with microscopic support is as indispensable for quality control as it is for research. Especially the field of “IC Test” requires not only highest mechanical precision, but also new instruments for quality control and research.

Prober

  • Electrical measurements on IC structures, potential contrast, detection of defects.
  • Options: Software operation and high or low temperature experiments.
  • Built-in piezo translators increase positioning accuracy to 10 nm including piezo-controlled, extremely gentle touchdown.
  • Optimal placement in the sample chamber of the “FEI 986 FC” FIB.
  • Positioning accuracy of 1μm under visual control.

Datenblatt Download

Electrostatic beam blanking

  • Adapted to the time resolution requirements of the switching process in electron beam lithography.
  • Optimized for shortest rise time values.
    Guaranteed “100 psec rise time”, actually measured between 50 and 35 picoseconds.
  • 40 KeV primary beam energy can still be fully sampled with 5 V pulses.

Datenblatt Download

Lift-out-Tool

  • Use to position and place a needle on a specimen surface while being observed by a scanning electron microscope.
  • Mounted with an adapter on the ceiling of the vacuum chamber.
  • Three orthogonal directions of motion for the needle (xyz) as well as rotation about its own axis.
  • High vacuum capability, drive via vacuum guide.

Datenblatt Download

Prober

  • Electrical measurements on IC structures, potential contrast, detection of defects.
  • Options: Software operation and high or low temperature experiments.
  • Built-in piezo translators increase positioning accuracy to 10 nm including piezo-controlled, extremely gentle touchdown.
  • Optimal placement in the sample chamber of the “FEI 986 FC” FIB.
  • Positioning accuracy of 1μm under visual control.

Datenblatt Download

Eine Nahaufnahme eines mechanischen Präzisionsgeräts mit mehreren Metallkomponenten, darunter Hebel und Zahnräder, die auf einer flachen, rechteckigen Basis montiert sind. Das Manipulatorengerät scheint für komplizierte mechanische Operationen konstruiert zu sein und weist eine symmetrische Anordnung auf.

Electrostatic beam blanking

  • Adapted to the time resolution requirements of the switching process in electron beam lithography.
  • Optimized for shortest rise time values.
    Guaranteed “100 psec rise time”, actually measured between 50 and 35 picoseconds.
  • 40 KeV primary beam energy can still be fully sampled with 5 V pulses.

Datenblatt Download

Ein metallisches mechanisches Bauteil mit verschiedenen zylindrischen Abschnitten und Verbindungsstücken, das einen strukturierten Griff und eine hervorstehende Stange mit geriffelter Oberfläche aufweist. Die polierte Oberfläche lässt vermuten, dass es sich um einen Teil von Robotermanipulatoren handeln könnte, die in einer größeren Maschine oder einem größeren Gerät verwendet werden.

Lift-out-Tool

  • Use to position and place a needle on a specimen surface while being observed by a scanning electron microscope.
  • Mounted with an adapter on the ceiling of the vacuum chamber.
  • Three orthogonal directions of motion for the needle (xyz) as well as rotation about its own axis.
  • High vacuum capability, drive via vacuum guide.

Datenblatt Download

Eine Nahaufnahme einer präzisen mechanischen Baugruppe mit einem goldfarbenen Hebelarm, der an ein Aushebewerkzeug erinnert und mit einer detailreichen Metallbasis mit mehreren Scharnieren und beweglichen Teilen verbunden ist. Die Baugruppe steht auf einer Metallmontageplatte mit vier Schraubenlöchern.

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