Cryo-Stage 5 Kelvin
A Substage: Prober-Module with three Manipulators
Detachable "Cryo-Substage" for lowest temperatures, mounted to a slightly modified original specimen stage of the Zeiss DSM 960 scanning electron microscope.
Principle of the cryostat: continuous evaporation chamber for liquid Helium. You may choose between working with just the cryostat alone, or cryostat and micromanipulators together at the same time. The cryostat rides on the X, Y and Z mechanics of the specimen stage; it is also possible to place a dummy there to work at room temperature, using the micro manipulators.
Closeup View of the Cryo-Prober
Module at the left in this photo (Pic.2), there is the front plate of the stage with the built-in Z-drive. The SE-detector is located about two o'clock in this view. The Cryo-Module is mounted in a "nest" on the working platform in the XY-table. At lower left, the liquid Helium inlet is made as a double-wall tube system. The Prober Module is mounted on four standoffs as "second level" on the working platform. The three manipulator-arms hold the drums with the bending piezo elements. Their movement is controlled extremely precise from an external voltage controller. This provides the fine touchdown movement, free of play and backlash. The needle holders are made as "Kelvin Connections".
The Prober Module - Taken off the Stage
If your wish to work under a light microscope, you may remove the Prober Module and place it on its standoffs on a flat surface. In the orientation of the photo above (Pic.3), imagine the SEM front plate 8 o'clock. The clearance on the right makes it possible to bypass the Helium inlet pipes when lifting off the module. So the cryo equipment remains in place when taking out the probing device.
- Specimen stage travel: X und Y = 15 mm x 15 mm, Z = 40 mm
- Micromanipulator travel: X and Y = 15 mm x 15 mm, Z = 20 mm,
Touchdown piezo range approximately +/- 0.3 mm,
Positioning accuracy of the needle tips under visual control: 1 µm.