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Heating Module 300 °C
Heating Module 300 °C
The photo shows the central element, the heating substage with a piece of an IC clamped to the top surface. Specimens up to about 20 mm x 20 mm can be observed in the SEM, at temperatures ranging from ambient to 300 degrees. Thermal contact to the specimen stage was minimized, so that no damage will occur.
Different from a number of other heating platforms, this module allows working at air up to full temperature.
The internal resistance heater has the shape of a "meander", and it is embedded between two layers of powder pressed mica. The specimen holder can be made in many individual shapes, usually some form of a depression or "nest" in the middle. Flat specimens can be clamped down with fine tungsten or bronze springs. Much care was taken to avoid electrical fields that may affect the SEM image.
The vacuum feedthrough flange and mounting hardware are part of the shipment volume.
There is also a 500 °C version with similar dimensions available.
Temperature Controllers
You may choose between "PID" and "manual" controlling. The PID-controller takes all heating parameters into account, after once performing a "learning"-routine. A continuous heating ramp can be selected, to heat up the specimen at constant rate. The controller will run up the temperature to the experiment value, and stop there without oscillations. The "manual" heating operation is controlled by operator observation. Although it is slower, and needs operator attention, the final temperature is very steady. The PID-controller can also work in a manual mode.
Temperature ranges
RT to 300, 500 or 800 degrees, depending upon the required version. Various methods of specimen clamping.
Attaching the Module to the Specimen Stage
The heating module is mounted to the SEM stage like a "large specimen". Together with the stage, the whole module will move about in the specimen chamber, and it can be tilted a small amount too. Caution with specimens that will melt and liquefy! The vacuum feedthrough for the SEM chamber wall is part of the shipment volume.
Dimensions: Approximately 100 mm x 60 mm x 40 mm. The shape of the base plate was cut in such way, that the module will not touch anything while opening the door on rails or a swing-away arm. The central furnace element has a multilayer reflection shield inside; it is attached with minimum surface contact, keeping the heat flow into the specimen stage at a very low level. Each heating module has its own individual shape, carefully cut to fit the SEM specimen stage.
Further Products of this Field of Work
- Micro manipulators (Prober-Modules) with integated heaters 300, 500 oder 800 degrees C. Fine positioning of the prober-needle at an accuracy of 1 µm or 0,1 µm, depending if with or without piezo fine shift.
"Cryo-Stages" (Liquid Nitrogen and Helium)
- "Cryo-Module" as a substage (Nitrogen)
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Heating Module 300 °C
Heating Module 300 °C, Version "Sandbox"