Cryo-Module (SEM-Substage)

This "Cryo module" can be mounted to the SEM stage "like a large specimen". The new temperature exchanger geometry inside the cryostat body, the so-called "whirlpool"-chamber, runs at very low vibration level, and minimum liquid nitrogen consumption. Liquid (or in some applications, gaseous) nitrogen flows through the chamber.

Any temperature from room temperature down to 80 Kelvin can be kept constant using the PID-controller, which is part of this package. The top of the cold surface holds a dovetail, so that with SEMs having an airlock mechanism, the specimen can be inserted through the loading port.

The holder which fits there, carries the specimen (isolated for specimen current measurement), a Faraday cup, and a 4-pin plug with shielded cables leading to the vacuum feedthrough at the chamber wall. This facilitates the observation of ICs at low temperatures in voltage contrast. The plug engages with the four electrical contacts at the end of the insertion movement.

This photo shows the cryo module in its version for the specimen stage of the SEM type JEOL 840 (6300, 6400).